Performance Analysis of Piezoresistive Mems for Pressure Measurement
نویسنده
چکیده
The paper describes the performance analysis and of design piezoresistive pressure sensorusing simulation technique. The piequ resistors are arranged in the wheat stone bridge configuration to achieve higher voltage sensitivity and low temp sensitivity The MFMS has been designed and simulated using MATLAB.This paper also discuses the simulations and the response from the MEMS.
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